Optically defined multifunctional patterning of photosensitive thin-film silica mesophases.

نویسندگان

  • D A Doshi
  • N K Huesing
  • M Lu
  • H Fan
  • Y Lu
  • K Simmons-Potter
  • B G Potter
  • A J Hurd
  • C J Brinker
چکیده

Photosensitive films incorporating molecular photoacid generators compartmentalized within a silica-surfactant mesophase were prepared by an evaporation-induced self-assembly process. Ultraviolet exposure promoted localized acid-catalyzed siloxane condensation, which can be used for selective etching of unexposed regions; for "gray-scale" patterning of refractive index, pore size, surface area, and wetting behavior; and for optically defining a mesophase transformation (from hexagonal to tetragonal) within the film. The ability to optically define and continuously control both structure and function on the macro- and mesoscales is of interest for sensor arrays, nanoreactors, photonic and fluidic devices, and low-dielectric-constant films.

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عنوان ژورنال:
  • Science

دوره 290 5489  شماره 

صفحات  -

تاریخ انتشار 2000